Understanding nanoscale chemistry is essential advanced semiconductor devices. In this webinar, we present atom probe tomography (APT) insights from an off‑the‑shelf Snapdragon x70 chip, highlighting how 3D atomic‑scale analysis reveals critical features and insights that traditional material characterization techniques often have challenges resolving. We will explore specimen preparation protocols for targeting individual transistors, dopant clustering and diffusion from source/drain regions, compositional changes in cobalt contacts, and investigation into barrier regions in back end of line (BEOL) interconnects.
To close the session, Dr. Christian Lavoie of IBM Research will join our live Q&A, offering expert perspective on key materials science challenges and the future of logic device scaling.
Tuesday, March 31 10AM CST
Register here
Presenters:
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Dr. Christian Lavoie
Principal Research Staff Manager
IBM's Watson Research Center
Christian Lavoie is a Principal Research Staff Member at IBM’s Watson Research Center, where he leads the Advanced Materials Characterization group. With over 30 years of experience, he develops materials and processes for semiconductor, AI, and quantum technologies, using innovative synchrotron x‑ray techniques to speed discovery and solve challenges in IBM’s most advanced device development and manufacturing.
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Dr. Katherine Rice
Applications & Market Development Mgr
CAMECA
Dr. Katherine Rice is an Applications Manager with Cameca Instruments in Madison, WI. She received her PhD in Chemical Engineering from the University of Colorado-Boulder and completed an NRC postdoc at NIST-Boulder. Her research interests include transmission EBSD, nanoparticle synthesis, and atom probe tomography.
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