UNDERSTANDING SEMICONDUCTORS
Modern Metrology From Lab To Fab By Rigaku.
A podcast for engineering leaders in characterization, metrology, process, and analytics, looking for discussion around semiconductor metrology challenges.
Episode 13: SEMICONDUCTOR SECRETS UNVEILED: NAVIGATING ATOM PROBE TOMOGRAPHY WITH DAVID LARSON
EXPLORE:
- The use of a Focused Ion Beam (FIB) at liquid nitrogen temperature to minimize damage and improve yield
- Challenges of yield and spatial distortion in atom probe technology
- How different laser wavelengths can enhance reconstruction and yield in heterogeneous structures
- How modeling and in situ measurements play a crucial role in predicting the field of operation
- The limitations, growth, and future improvements of atom probe technology, including its application in analyzing real devices
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